Fabrication of High TCR TaAl-N Thin Film by Reactive Sputtering Method

Fabrication of InGaN thin-film transistors using pulsed sputtering deposition

We report the first demonstration of operational InGaN-based thin-film transistors (TFTs) on glass substrates. The key to our success was coating the glass substrate with a thin amorphous layer of HfO2, which enabled a highly c-axis-oriented growth of InGaN films using pulsed sputtering deposition. The electrical characteristics of the thin films were controlled easily by varying their In conte...

The Effect of Substrate on Structural and Electrical Properties of Cu3N Thin Film by DC Reactive Magnetron Sputtering

The aim of this paper is to study the effect of substrate on the Cu3N thin films. At first Cu3N thin films are prepared using DC magnetron sputtering system. Then structural properties, surface roughness, and electrical resistance are studied using X-ray diffraction (XRD), the atomic force microscope (AFM) and four-point probe techniques respectively. Finally, the results are investigated and c...

High-mobility ZrInO thin-film transistor prepared by an all-DC-sputtering method at room temperature

Thin-film transistors (TFTs) with zirconium-doped indium oxide (ZrInO) semiconductor were successfully fabricated by an all-DC-sputtering method at room temperature. The ZrInO TFT without any intentionally annealing steps exhibited a high saturation mobility of 25.1 cm(2)V(-1)s(-1). The threshold voltage shift was only 0.35 V for the ZrInO TFT under positive gate bias stress for 1 hour. Detaile...

Dry and Wet Wear Characteristic of TiO2 Thin Film Prepared by Magnetic Sputtering in Ringer Solution

In this research, a thin film of TiO2 was applied on AZ91D using the method of magnetic sputtering. Microstructure investigations were done using field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD). Wear resistance for the coating was investigated using the pin on the disk in the form of dry and in the Ringer's solution. After this test, the worn surface of the sampl...

Thin-film TiPbO3 varistors obtained by two-source magnetron sputtering